Overview of gate linewidth control in the manufacture of CMOS logic chips.
Donald G. ChesebroJames W. AdkissonLyman R. ClarkSteven N. EslingerMargaret A. FaucherSteven J. HolmesRaymond P. MalletteEdward J. NowakEdward W. SengleSteven H. VoldmanThomas W. WeeksPublished in: IBM J. Res. Dev. (1995)