Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor.
Jaewoo LeeJong-Pil ImJeong-Hun KimSol-Yee LimSeung-Eon MoonPublished in: Sensors (2019)
Keyphrases
- theoretical analysis
- sensitivity analysis
- parameter values
- input data
- computational model
- probabilistic model
- parameter estimation
- data sets
- measured data
- maximum likelihood estimation
- linear model
- conceptual model
- experimental data
- statistical model
- cost function
- mathematical model
- high speed
- formal model
- probability distribution
- wireless sensor networks
- autoregressive
- parametric models
- real time