An Automatic Method for Extracting and Classifying Defect in Optical Photomask Images.
Youngmin HaHong JeongPublished in: MUE (2007)
Keyphrases
- fully automatic
- edge detection
- test images
- segmentation method
- similarity measure
- ground truth
- principal components
- image data
- input data
- synthetic and real images
- region of interest
- image classification
- reconstruction method
- image set
- ccd camera
- three dimensional
- image segmentation
- interpolation method
- image processing
- fisheye lens
- feature points
- image features
- feature extraction