Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning.
Anahid N. JalaliClemens HeistracherAlexander SchindlerBernhard HaslhoferTanja NemethRobert GlawarWilfried SihnPeter De BoerPublished in: CoRR (2019)
Keyphrases
- machine learning
- plasma etching
- pattern recognition
- machine learning algorithms
- text classification
- computational intelligence
- machine learning methods
- learning algorithm
- reinforcement learning
- inductive learning
- learning problems
- text mining
- decision trees
- knowledge acquisition
- artificial intelligence
- neural network
- failure prediction
- machine learning and data mining
- explanation based learning
- thin film
- machine learning approaches
- learning tasks
- kernel methods
- learning systems
- natural language processing
- supervised learning
- knowledge discovery
- knowledge representation
- active learning
- model selection
- databases
- statistical learning
- information extraction
- artificial neural networks
- case study