Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process.
Si-Jun KimMinsu ChoiSang-Ho LeeWon-nyoung JeongYoung-Seok LeeIn-Ho SeongChul-Hee ChoDae-Woong KimShin-Jae YouPublished in: Sensors (2023)