Towards A Generic Semiconductor Manufacturing Simulation Model.

Abdelhak Khemiri Claude Yugma Stéphane Dauzère-Pérès

Published in: WSC (2021)

Keyphrases

simulation model
semiconductor manufacturing
discrete event simulation
discrete event
process control
simulation models
agent based simulation
production system
simulation environment
mathematical model
simulation tool
analytical model
domain specific
matlab simulink
real time