Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study.
Chen-Fu ChienTran Hong Van NguyenYi-Chiu LiYing-Jen ChenPublished in: Comput. Ind. Eng. (2023)
Keyphrases
- decision analysis
- semiconductor manufacturing
- process control
- decision theory
- multi criteria
- influence diagrams
- decision makers
- defect detection
- decision making
- multi attribute
- bayesian networks
- expert systems
- cumulative prospect theory
- risk analysis
- production system
- expert knowledge
- decision model
- game playing
- probabilistic inference
- data mining
- theoretical framework
- knowledge acquisition
- software engineering
- probability distribution
- control system
- artificial intelligence
- genetic algorithm