Defect spatial pattern recognition using a hybrid SOM-SVM approach in semiconductor manufacturing.
Te-Sheng LiCheng-Lung HuangPublished in: Expert Syst. Appl. (2009)
Keyphrases
- semiconductor manufacturing
- spatial patterns
- discrete event simulation
- support vector machine svm
- support vector
- self organizing maps
- process control
- feature vectors
- support vector machine
- knn
- support vectors
- input space
- feature selection
- spatio temporal
- svm classifier
- defect detection
- production system
- feature space
- spatial distribution
- hyperplane
- classification algorithm
- kohonen self organizing map
- kernel function
- input data
- k means
- generalization ability
- svm classification
- pattern discovery
- competitive learning
- topology preserving
- multi class
- gene expression
- multi class classification
- kernel methods
- classification method
- data sets
- unsupervised learning
- high dimensional
- feature extraction
- artificial intelligence
- neural network