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Stiction identification in nonlinear process control loops.
Ulaganathan Nallasivam
Babji Srinivasan
Raghunathan Rengaswamy
Published in:
Comput. Chem. Eng. (2010)
Keyphrases
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process control
control system
intelligent control
product quality
manufacturing process
semiconductor manufacturing
dynamic systems
automatic identification
data sets
data mining
information retrieval
artificial intelligence
nonlinear models