Vacuum-sealed silicon micromachined pressure sensors.

Masayoshi Esashi Susumu Sugiyama Kyoichi Ikeda Yuelin Wang Haruzo Miyashita

Published in: Proc. IEEE (1998)

Keyphrases

sensor networks
low cost
real time
sensor data
sensor technology
ultra high
high speed
data fusion
multi sensor
three dimensional
sensor fusion
sensor measurements
bit rate
sensory data
sensor readings
imaging sensors