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Design and Manufacture of a High Precision MEMS Flexible Force Sensor.
Huimin Zhang
Yanlu Feng
Wei Zhang
Published in:
NEMS (2021)
Keyphrases
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high precision
high recall
case study
design process
web services
achieve high precision
manufacturing process
high accuracy
sensor networks
real time
sensor data
vision system
computer aided
user experience
engineering design
design methodology
product design
high reliability
modular design