Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor.
Yul KohDuan Jian GohSagnik GhoshHan Xuan WongJaibir SharmaAmit LalEldwin J. NgJoshua En-Yuan LeePublished in: IEEE SENSORS (2022)
Keyphrases
- contact force
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- information systems
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