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Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems.
Tim Fühner
Andreas Erdmann
Richárd Farkas
Bernd Tollkühn
Gabriella Kókai
Published in:
EvoWorkshops (2004)
Keyphrases
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imaging systems
genetic algorithm
image formation
machine vision
synthetic aperture
light field
computer vision
preprocessing
single image
lighting conditions
neural network
high quality
viewpoint
semi supervised