Improving cluster tools performance using colored Petri nets in semiconductor manifacturing.

Dongjin Kim Emrah Cimren Robert Havey Abbas K. Zaidi

Published in: WSC (2012)

Keyphrases

colored petri nets
software tools
petri net
design decisions
clustering algorithm
building blocks
database
expert systems
similarity measure
data objects
end users
case study
e learning
artificial intelligence
information retrieval
machine learning
databases