Robert Havey

Publication Activity (10 Years)

Years Active: 2011-2014
Publications (10 Years): 0

Top Topics

User Oriented Evaluation

Top Venues

Publications

D. J. Kim, Lixin Wang, Robert Havey
Measuring cycle time through the use of the queuing theory formula (G/G/M). WSC (2014)
Emrah Cimren, Robert Havey, Dongjin Kim
A novel simulation methodology for modeling cluster tools. WSC (2013)
Dongjin Kim, Emrah Cimren, Robert Havey, Abbas K. Zaidi
Improving cluster tools performance using colored Petri nets in semiconductor manifacturing. WSC (2012)
Robert Havey, Lixin Wang, Dongjin Kim
Application of tool science techniques to improve tool efficiency for a dry etch cluster tool. WSC (2011)