Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes.
Shu-Kai S. FanChia-Yu HsuChih-Hung JenKuan-Lung ChenLi-Ting JuanPublished in: Adv. Eng. Informatics (2020)
Keyphrases
- manufacturing processes
- denoising
- semiconductor manufacturing
- manufacturing systems
- image denoising
- noisy images
- product quality
- total variation
- image processing
- machining processes
- real time
- denoising methods
- wavelet packet
- mathematical models
- detection algorithm
- software engineering
- domain knowledge
- multi agent systems
- artificial intelligence