Semiconductor wafer representation for TCAD.
Martin D. GilesDuane S. BoningGoodwin R. ChinWalter C. Dietrich Jr.Michael S. KarasickMark E. LawPurnendu K. MozumderLee R. NackmanV. T. RajanDuncan M. Hank WalkerRobert H. WangAlexander S. WongPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1994)