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Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning.

Zeyi WuQingsong Xu
Published in: IEEE Trans Autom. Sci. Eng. (2019)
Keyphrases
  • design process
  • optimal design
  • case study
  • computer aided
  • design decisions
  • information systems
  • multi agent
  • user interface
  • wireless sensor networks
  • design principles
  • engineering design
  • software design