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Wafer-level hybrid bonding technology with copper/polymer co-planarization.

Mayu AokiKazuyuki HozawaKenichi Takeda
Published in: 3DIC (2010)
Keyphrases
  • case study
  • data processing
  • integrated circuit
  • data mining
  • machine learning
  • key technologies
  • levels of abstraction
  • magnetic recording
  • databases
  • artificial intelligence
  • computer simulation