Polynomial Neural Network Modeling of Reactive Ion Etching Process Using GMDH Method.
Seung Soo HanSang HongPublished in: ISNN (2) (2006)
Keyphrases
- neural network
- segmentation method
- modeling method
- training process
- computational cost
- similarity measure
- support vector
- optimization process
- high accuracy
- prediction model
- detection method
- backpropagation neural network
- data sets
- back propagation
- clustering method
- input data
- edge detection
- dynamic programming
- cost function
- pairwise
- preprocessing