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MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature.
Muhannad Ghanam
Frank Goldschmidtboeing
Thomas Bilger
Andreas Bucherer
Peter Woias
Published in:
Sensors (2023)
Keyphrases
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high temperature
wide range
infrared
thermal imaging
sensor data
data fusion
high precision
real time
heat transfer
air temperature
thermal conductivity
room temperature
electrical power
power system
multi sensor
force sensing
finite element analysis
power plant