Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning.
M. A. JebriGuillaume GratonEl Mostafa El AdelMustapha OuladsineJacques PinatonPublished in: ICSC (2016)
Keyphrases
- learning algorithm
- learning process
- online learning
- process control
- knowledge acquisition
- supervised learning
- learning tasks
- learning systems
- life long learning
- real time
- inductive inference
- learning community
- virtual environment
- unsupervised learning
- user interface
- artificial neural networks
- reinforcement learning
- knowledge base
- e learning
- machine learning
- data mining