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Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis.

Haewook ParkJuhyun KimSungwon ChoKyunghyun KimSungho JangYounsok ChoiHohyun Lee
Published in: Sensors (2024)
Keyphrases
  • robot arm
  • scanning electron microscope
  • real time
  • motion planning
  • thin film
  • three dimensional
  • monitoring system
  • inverse kinematics
  • end effector
  • sensor networks
  • sensor data
  • knowledge base
  • fuzzy sets
  • fault diagnosis