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Informational Lithography Approach Based on Source and Mask Optimization.
Xu Ma
Yihua Pan
Shengen Zhang
Javier Garcia-Frías
Gonzalo R. Arce
Published in:
IEEE Trans. Computational Imaging (2021)
Keyphrases
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optimization problems
global optimization
real time
optimal design
optimization algorithm
discrete optimization
evolution strategy
constrained optimization
optimization process
electron beam
database
optimization methods
optimization method
expert systems
similarity measure
machine learning
data sets