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Multi-scale analysis of polysilicon MEMS sensors subject to accidental drops: Effect of packaging.

Aldo GhisiFabio FachinStefano MarianiSarah Zerbini
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • random access memory
  • real time
  • sensor networks
  • databases
  • high speed
  • high density
  • graphical models
  • sensor data