The efficiency of inspection based on out of control detection in wafer fabrication.
Israel TirkelPublished in: Comput. Ind. Eng. (2016)
Keyphrases
- wafer fabrication
- object detection
- detection method
- control system
- false alarms
- detection rate
- automatic detection
- adaptive control
- change detection
- detection algorithm
- control theory
- neural network
- control method
- anomaly detection
- high efficiency
- detection accuracy
- process control
- multiscale
- computational efficiency
- robot control
- visual inspection
- control problems
- control strategies
- computational complexity
- video data
- data acquisition