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Litho-Friendly Decomposition Method for Self-Aligned Double Patterning.

Minoo MirsaeediAndres J. TorresMohab H. Anis
Published in: IEEE Trans. Very Large Scale Integr. Syst. (2013)
Keyphrases
  • decomposition method
  • decomposition methods
  • decomposition algorithm
  • tree decomposition
  • shape decomposition
  • qr decomposition
  • decision making
  • long term