Identifying systematic spatial failure patterns through wafer clustering.

Mohamed Baker Alawieh Fa Wang Xin Li

Published in: ISCAS (2016)

Keyphrases

spatial patterns
clustering algorithm
spatial data
similar patterns
pattern extraction
k means
spatial information
spatial clustering
spatio temporal patterns
spatio temporal
clustering method

spatial and temporal
cluster analysis
data clustering
spatial features
neighborhood information
multiple data streams
outlier detection
unsupervised learning
root cause
interesting patterns
categorical data

self organizing maps
spatio temporal data
spatial reasoning
pattern discovery
semiconductor manufacturing
hierarchical clustering
spectral clustering
document clustering
spatial data mining
website

grid cells
multivariate time series
integrated circuit
spatial databases
design patterns
pattern mining
frequent patterns
space time
high dimensional data
data mining techniques