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A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes.
Emmanuel Brousseau
Richard Barton
Stefan S. Dimov
Samuel Bigot
Published in:
IPAS (2010)
Keyphrases
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electro mechanical systems
process model
software process
integrated circuit
high density
search engine
data mining
information systems
website
database systems
probability distribution
software development
reasoning processes
thin film transistor