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plasma treated hafnium oxide film based on electrolyte-insulator-semiconductor structure for pH-sensor application.

Tseng-Fu LuJer-Chyi WangChia-Ming YangChung-Po ChangKuan-I HoChi-Fong AiChao-Sung Lai
Published in: Microelectron. Reliab. (2010)
Keyphrases
  • real time
  • fuel cell
  • genetic algorithm
  • expert systems
  • tree structure
  • structural information
  • complex structures
  • plasma etching