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Feedback control of surface roughness during thin-film growth using approximate low-order ODE model.

Amit VarshneyAntonios Armaou
Published in: CDC (2006)
Keyphrases
  • low order
  • feedback control
  • high order
  • thin film
  • real time
  • machine learning
  • probabilistic model
  • higher order
  • multi layer
  • markov models
  • mathematical model
  • point correspondences
  • surface roughness