Control of photoresist film thickness: Iterative feedback tuning approach.

Arthur Tay Weng Khuen Ho Jiewen Deng Boon Keng Lok

Published in: Comput. Chem. Eng. (2006)

Keyphrases

thin film
feedback loop
control method
visual feedback
pairwise
human operators
artificial neural networks
viewpoint
control system
image data
multi layer
magnetic field
high density
refractive index
film thickness