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Control of photoresist film thickness: Iterative feedback tuning approach.

Arthur TayWeng Khuen HoJiewen DengBoon Keng Lok
Published in: Comput. Chem. Eng. (2006)
Keyphrases
  • thin film
  • feedback loop
  • control method
  • visual feedback
  • pairwise
  • human operators
  • artificial neural networks
  • viewpoint
  • control system
  • image data
  • multi layer
  • magnetic field
  • high density
  • refractive index
  • film thickness