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AFFCCA: a tool for critical area analysis with circular defects and lithography deformed layout.

Igor BubelWojciech MalyThomas WaasPranab K. NagHans HartmannDoris Schmitt-LandsiedelSusanne Griep
Published in: DFT (1995)
Keyphrases
  • analysis tool
  • mobile robot
  • learning algorithm
  • database systems
  • data analysis
  • image analysis
  • three dimensional
  • statistical analysis
  • hough transform
  • software tools
  • graphical display