Investigation of a new method for dopant characterization.
Jérôme AdrianN. RodriguezFabien EsselyGérald HallerC. GrosjeanAlain PortavoceC. GirardeauxPublished in: Microelectron. Reliab. (2007)
Keyphrases
- preprocessing
- high precision
- clustering method
- theoretical analysis
- high accuracy
- optimization method
- synthetic data
- evaluation method
- neural network
- mathematical model
- detection algorithm
- main contribution
- classification accuracy
- probabilistic model
- computational cost
- objective function
- support vector machine
- cost function
- segmentation method
- artificial neural networks
- statistical model
- classification method
- computational complexity
- information retrieval