Simulation of equipment design optimisation in microelectronics manufacturing.

C. H. Tong Juan C. Meza Chris D. Moen

Published in: Annual Simulation Symposium (1997)

Keyphrases

design process
neural network
simulation environment
data sets
simulation software
building blocks
mathematical model
working principle
real time
simulation tool
manufacturing process
simulation models
design methodology
computer aided
software architecture
object oriented
user interface
decision making