Adaptive Feedforward for a Wafer Stage in a Lithographic Tool.
Hans ButlerPublished in: IEEE Trans. Control. Syst. Technol. (2013)
Keyphrases
- feed forward
- adaptive neural
- back propagation
- artificial neural networks
- neural nets
- neural network
- recurrent neural networks
- hidden layer
- biologically plausible
- neural architecture
- error back propagation
- visual cortex
- recurrent networks
- feed forward neural networks
- genetic algorithm
- activation function
- adaptive control
- fuzzy control
- integrated circuit
- higher order
- decision making