Lithography aware critical area estimation and yield analysis.

Priyamvada Vijayakumar Vikram B. Suresh Sandip Kundu

Published in: ITC (2011)

Keyphrases

computer vision
information systems
decision trees
data sets
neural network
machine learning
information retrieval
decision making
multimedia
case study
database systems
expert systems
user interface
mobile robot
statistical analysis
automatic analysis