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Design of CMOS MEMS based on mechanical resonators using a RF simulation approach.

Laurent LatorreVincent BeroullePascal Nouet
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2004)
Keyphrases
  • circuit design
  • low cost
  • mechanical design
  • real time
  • case study
  • expert systems
  • knowledge based systems
  • conceptual design
  • simulation software
  • molecular dynamics