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Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor Manufacturing.
Moon Gi Seok
Wentong Cai
Daejin Park
Published in:
IEEE Access (2021)
Keyphrases
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semiconductor manufacturing
abstraction levels
levels of abstraction
discrete event simulation
process control
database
data conversion
data driven
smart environments
data sets
databases
artificial intelligence
multiresolution
state space
digital images
adaptive filtering