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Spatial estimation of wafer measurement parameters using Gaussian process models.

Nathan KuppKe HuangJohn M. Carulli Jr.Yiorgos Makris
Published in: ITC (2012)
Keyphrases
  • parameter estimation
  • maximum likelihood estimation
  • maximum likelihood
  • gaussian process models
  • spatial and temporal
  • parameter space
  • gaussian processes
  • spatio temporal