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High sensitivity nanostructure incorporated interdigital silicon based capacitive accelerometer.

Mahdiyeh MehranShams Mohajerzadeh
Published in: Microelectron. J. (2015)
Keyphrases
  • high sensitivity
  • optical fiber
  • low cost
  • high speed
  • gesture recognition
  • high density
  • data sets
  • information retrieval
  • information systems
  • image processing
  • physical activity
  • space charge
  • fiber bragg grating