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High sensitivity nanostructure incorporated interdigital silicon based capacitive accelerometer.
Mahdiyeh Mehran
Shams Mohajerzadeh
Published in:
Microelectron. J. (2015)
Keyphrases
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high sensitivity
optical fiber
low cost
high speed
gesture recognition
high density
data sets
information retrieval
information systems
image processing
physical activity
space charge
fiber bragg grating