Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs.
Rana Iqtidar ShakoorShafaat Ahmed BazazMichael KraftYongjun LaiMuhammad Masood Ul HassanPublished in: Sensors (2009)
Keyphrases
- degrees of freedom
- infrared
- pose estimation
- frequency band
- position control
- robotic manipulator
- mechanical design
- power plant
- path planning
- motion planning
- control algorithm
- configuration space
- end effector
- visible spectrum
- high temperature
- solder ball connect
- database
- joint space
- finite element analysis
- limit cycle
- air temperature
- thermal conductivity
- pulse width
- multiscale