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Optical Measurement of the Dynamic Response of an Electrothermal Microactuator.

Hao ChenXinjie WangZhanwen XiJiong WangWeirong Nie
Published in: NEMS (2021)
Keyphrases
  • dynamic response
  • light intensity
  • neural network controller
  • real time
  • decision trees
  • data sets
  • information retrieval
  • genetic algorithm
  • multiscale