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Optical Measurement of the Dynamic Response of an Electrothermal Microactuator.
Hao Chen
Xinjie Wang
Zhanwen Xi
Jiong Wang
Weirong Nie
Published in:
NEMS (2021)
Keyphrases
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dynamic response
light intensity
neural network controller
real time
decision trees
data sets
information retrieval
genetic algorithm
multiscale