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Energy monitoring of high dose ion implantation in semiconductors via photocurrent measurement.
Christoph Eichenseer
Gerhard Pöppel
Thomas Mikolajick
Published in:
Microelectron. Reliab. (2015)
Keyphrases
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high energy
monitoring system
real time
wide range
three dimensional
data acquisition
magnetic field
neural network
image segmentation
energy consumption
energy minimization