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Application of Wafer Defect Pattern Classification Model in the Semiconductor Industry.

Chin-Wei LeeDaniel HládekMatús PlevaYuan-Fu LiaoMing-Hsiang Su
Published in: APSIPA ASC (2023)
Keyphrases
  • semiconductor manufacturing
  • data sets
  • similarity measure
  • multi agent systems
  • expert systems
  • relational databases
  • software engineering
  • plasma etching