The transport strategies for fully automated manufacturing in 300 mm wafer fab.

D. Y. Sha C. J. Yang

Published in: Int. J. Comput. Integr. Manuf. (2009)

Keyphrases

fully automated
semiconductor manufacturing
fully automatic
semi automated
manual segmentation
three dimensional
labor intensive
completely automated
wafer fabrication
quality control
integrated circuit
computer aided
manufacturing systems
production planning