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Actuation and Sensing for PZT Micromirrors Using $\mathbf{d}_{33}$ Mode Directional Interdigitated Electrodes.

Pooja ThakkarAnton LagoshMadeleine PetschniggDominik HolzmannJaka Pribosek
Published in: SENSORS (2023)
Keyphrases
  • sensor networks
  • high density
  • sensor fusion
  • directional features
  • mixed mode
  • control system
  • mathematical model
  • data acquisition
  • degrees of freedom
  • artificial intelligence
  • directional information
  • mechanical design