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CMOS scaling into the 21st century: 0.1 µm and beyond.

Yuan TaurYuh-Jier MiiDavid J. FrankH.-S. Philip WongDouglas A. BuchananShalom J. WindStephen A. RishtonWatson A. Sai-HalaszEdward J. Nowak
Published in: IBM J. Res. Dev. (1995)
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