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A Characterization Method of Thin Film Parameters Based on Adaptive Differential Evolution Algorithm.
Lihua Lei
Yuqing Guan
Yanhua Zeng
Lin Zhao
Zhangning Xie
Zhiguo Han
Chengming Cao
Yunxia Fu
Published in:
IEEE Access (2021)
Keyphrases
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differential evolution algorithm
thin film
dynamic programming
scale factor
objective function
cost function
differential evolution
optimization method
particle swarm optimization algorithm
particle swarm optimization
fitness function
prediction model
control parameters
high density
crossover rate