The heuristic preemptive dispatching method of material transportation system in 300 mm semiconductor fabrication.
Chia-Nan WangLi-Chin ChenPublished in: J. Intell. Manuf. (2012)
Keyphrases
- high precision
- dynamic programming
- experimental evaluation
- feature set
- data sets
- objective function
- high accuracy
- cross section
- reconstruction method
- fully automatic
- detection method
- support vector machine svm
- probabilistic model
- computational cost
- significant improvement
- similarity measure
- edge detection
- segmentation method
- pairwise
- computational complexity
- search procedure
- feature selection